TX-45KH

TX-30KH

【Characteristic】

Low temperature to 5℃
All stainless pump
Non-CFC Refrigerant
Central Monitoring System available(CMS)
For 200mm,300mm PVD process

【Specifications】

TYPE TX-45KH

Temperature Range
Temperature accuracy
Coolant

5℃~+30℃
±0.1℃(@No-load change)
Novec; Galden; DI/EG; DI
Pump
Pump performance
1.2Kw
180 Litter/Min @0.3Mpa
Compressor cooling capacity
Refrigerant
45kw @20℃
HFC
Dimension 660(W)×960(D)×1800mm(H)
Wight 250Kg
Power 3-phase AC208V(380VAC)